发明名称 半導体素子の実装方法
摘要 The invention relates to a method of mounting a semiconductor device. Pressurizing and heating are conducted while spraying reducing gas (21) to conduct bump jointing. A plurality of semiconductor elements are arranged on the surface of a substrate (2), and all pressurized heavy substances (22) are divided, and thereby flowing path of the reducing gas (21) can be ensured, gap between a bump (4) and an electrode terminal can be inhibited, and warping at the time of bump jointing can be prevented.
申请公布号 JP5870261(B2) 申请公布日期 2016.02.24
申请号 JP20110218825 申请日期 2011.10.03
申请人 パナソニックIPマネジメント株式会社 发明人 櫻井 大輔;後川 和也
分类号 H01L21/60;H01L25/065;H01L25/07;H01L25/18 主分类号 H01L21/60
代理机构 代理人
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