发明名称 FFS型TFT−LCDアレイ基板の製造方法
摘要 A manufacturing method for an array substrate with a fringe field switching (FFS) type thin film transistor (TFT) liquid crystal display (LCD) includes the following steps. A pattern of a source electrode, a drain electrode, a data line and a pixel electrode is formed by patterning a stack of a first transparent conductive film, a first metal film and a doped semiconductor film formed successively on a transparent substrate. A pattern of a doped semiconductor film and a pattern of a semiconductor layer including a TFT channel are formed by patterning a semiconductor film after the semiconductor film is formed. A pattern of contact holes of the data line in the pad area, a gate line, a gate electrode and a common electrode line is formed by patterning a stack of an insulating film and a second metal film formed successively. A pattern of a common electrode is formed by patterning a second transparent conductive film after the second transparent conductive film is formed.
申请公布号 JP5868949(B2) 申请公布日期 2016.02.24
申请号 JP20130506471 申请日期 2011.04.26
申请人 北京京東方光電科技有限公司 发明人 宋 泳錫;崔 承▲鎮▼;▲劉▼ ▲聖▼烈
分类号 G02F1/1368;H01L21/336;H01L29/786 主分类号 G02F1/1368
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