摘要 |
The present disclosure relates to a process for manufacturing Organic Light-Emitting Diode (OLED) display panel, and in particular to a device and a method for detecting evaporation source. Through installing a mobile detector above a linear evaporation source, the vapor-deposition rate of the whole linear can be timely and effectively detected. The feedback of uniformity of vapor-deposition can be effectively given, and at the same time the abnormity of the vapor-deposition can be found. Meanwhile, in order to increase the yield and quality of product as well as prevent the evaporation source pollution caused by the dropping of some defects such as organic material or dust, the mobile detector is locked in one side of the evaporation source when it does not work. |