| 摘要 |
The present invention relates to a small angle scattering analysis apparatus which is suitable for a minute structural measurement of a sample. The small angle scattering analysis apparatus comprises: an output unit to emit an X-ray beam; a stage unit wherein a sample is mounted, a detection unit to detect a scattered beam, and a first and a second slit unit arranged between the output unit and the stage unit; a first beam path for guiding a path of the X-ray beam between the output unit and the stage unit, and to shield an external exposure; a connection unit to connect the output unit to the first slit unit to shield the external exposure of the X-ray beam which is transformed during a process of changing an emission angle of the output unit for the first beam path; a second beam path to shield the external exposure of the scattered beam between the stage unit and the detection unit; and a base unit to control a position of the output unit, the first beam path, the stage unit, the second beam path, or the detection unit in a longitudinal direction on a straight line. The first list unit and the second slit unit includes the aligner to restrict an area of the X-ray beam, wherein an angle for the first beam path is able to be changed, to a selected size and a square shape. |
