发明名称 VARIABLE WIRE-SAW DEVICE
摘要 The present invention is to provide a variable wire-saw device capable of improving the flatness of a cut surface in correspondence with the size of an object to be processed. The variable wire-saw device according to the present invention to cut and process an ingot by using a wire comprises: a holder to which the ingot is bonded; a wire supply bobbin around which the wire is wound; a wire winding bobbin around which the wire supplied from the wire supply bobbin is wound; multiple guide rollers which are disposed between the wire supply bobbin and the wire winding bobbin, and around which the wire is wound, so as to induce the wire; a slurry supply rod which supplies a slurry solution to the wire; a motor which is connected to one or more of the guide rollers to rotate the guide rollers; and a support block which fixes and supports the holder, wherein the guide rollers are variable in position.
申请公布号 KR101596734(B1) 申请公布日期 2016.02.24
申请号 KR20150017141 申请日期 2015.02.04
申请人 WONIK QNC CORPORATION 发明人 HEO, WOO SEOK
分类号 H01L21/304;B23D55/08 主分类号 H01L21/304
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