| 摘要 |
The apparatus comprises a radio frequency source (106), an outer electrode (103) located on an outside of a treatment container (102), and rotatably mounted, electrically conductive gas lance (101) for supplying process gas to the container so that a high frequency of the radio frequency source is applied to the outer electrode or the gas lance, where the gas lance is partially or completely formed as a hollow cathode with an inner cavity. The cavity of hollow cathode is fluidly connected to an interior of the container and gas lance by lateral and/or axial holes or recesses. The apparatus comprises a radio frequency source (106), an outer electrode (103) located on an outside of a treatment container (102), and a rotatably mounted, electrically conductive gas lance (101) for supplying process gas to the container so that a high frequency of the radio frequency source is applied to the outer electrode or the gas lance, where the gas lance is partially or completely formed as a hollow cathode with an inner cavity. A cavity of hollow cathode is fluidly connected to an interior of the container and the gas lance, and a plasma is produced inside the cavity of the hollow cathode. The gas lance is provided with holes or recesses having diameters of 0.1-0.2 mm, is configured to supply the process gas into the interior of the container and/or into the cavity of hollow cathode, and has a length of 200-300 mm. The inner cavity has an inner diameter of 2-20 mm. The gas lance is formed such that the process gas and neutrally non-coating inert gas are physically separated. The process gas is directly supplied to the container, and the neutral inert gas is directly supplied to the inner cavity of the hollow cathode. The gas lance includes an inner gas lance configured to supply inert gas into the inner cavity of hollow cathode, and an outer gas lance configured to supply the process gas to the interior of the container. The outer gas lance is partially or completely positioned below the inner gas lance. An independent claim is included for a method for coating a container. |
