发明名称 APPARATUS FOR MANUFACTURING AN INORGANIC THIN-FILM SOLAR CELL, AND METHOD FOR CONTROLLING SAME
摘要 The present invention relates to an apparatus for manufacturing an inorganic thin-film solar cell, the apparatus including: a substrate stage which is mounted in a chamber and in which a solar cell substrate is disposed; and an inorganic powder supply unit including a nozzle configured to discharge an inorganic powder aerosol containing an inorganic powder onto the substrate stage in a supersonic flow so as to form a solar cell layer on the solar cell substrate, and an inorganic powder supply portion configured to supply the inorganic powder aerosol to the nozzle.
申请公布号 EP2674990(A4) 申请公布日期 2016.02.24
申请号 EP20120744903 申请日期 2012.02.09
申请人 KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION 发明人 PARK, JUNG JAE;KIM, DO YEON;LEE, JONG GUN;LEE, MIN WOOK;YOON, SUK GOO
分类号 H01L31/18;C23C24/04;H01L21/02;H01L31/042 主分类号 H01L31/18
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