发明名称 |
APPARATUS FOR MANUFACTURING AN INORGANIC THIN-FILM SOLAR CELL, AND METHOD FOR CONTROLLING SAME |
摘要 |
The present invention relates to an apparatus for manufacturing an inorganic thin-film solar cell, the apparatus including: a substrate stage which is mounted in a chamber and in which a solar cell substrate is disposed; and an inorganic powder supply unit including a nozzle configured to discharge an inorganic powder aerosol containing an inorganic powder onto the substrate stage in a supersonic flow so as to form a solar cell layer on the solar cell substrate, and an inorganic powder supply portion configured to supply the inorganic powder aerosol to the nozzle. |
申请公布号 |
EP2674990(A4) |
申请公布日期 |
2016.02.24 |
申请号 |
EP20120744903 |
申请日期 |
2012.02.09 |
申请人 |
KOREA UNIVERSITY RESEARCH AND BUSINESS FOUNDATION |
发明人 |
PARK, JUNG JAE;KIM, DO YEON;LEE, JONG GUN;LEE, MIN WOOK;YOON, SUK GOO |
分类号 |
H01L31/18;C23C24/04;H01L21/02;H01L31/042 |
主分类号 |
H01L31/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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