发明名称 |
REMOTE CONTROL DEVICE OF SPUTTERING APPARATUS FOR FABRICATION OF SUNTING FILM |
摘要 |
An objective of the present invention is to remotely control a position of a guide roll for guiding a movement of a tinting film in sputtering equipment which coats a thin film on the tinting film from outside the equipment to remove wrinkles of a film material without stopping the equipment to prevent various losses of work processes by stopping the equipment and improve productivity. To achieve the objective, the present invention provides a device for remotely controlling a guide roll of sputtering equipment for manufacturing a tinting film. The sputtering equipment for manufacturing a tinting film comprises: a guide roll installed in a vacuum chamber to guide a movement of a film material; and an adjustment knob mounted on the guide roll to adjust a position of the guide roll with respect to the film material. The device for remotely controlling the guide roll of the sputtering equipment for manufacturing a tinting film comprises: a drive means to rotate the adjustment knob in a desired direction in the vacuum chamber; and a control means to remotely control drive of the drive means from outside the vacuum chamber. |
申请公布号 |
KR20160020818(A) |
申请公布日期 |
2016.02.24 |
申请号 |
KR20140106041 |
申请日期 |
2014.08.14 |
申请人 |
NEXFIL CO., LTD. |
发明人 |
LEE, SHIN SOON;LEE, JAE CHUL |
分类号 |
C23C14/34;B65H77/00;C23C14/56 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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