发明名称 REMOTE CONTROL DEVICE OF SPUTTERING APPARATUS FOR FABRICATION OF SUNTING FILM
摘要 An objective of the present invention is to remotely control a position of a guide roll for guiding a movement of a tinting film in sputtering equipment which coats a thin film on the tinting film from outside the equipment to remove wrinkles of a film material without stopping the equipment to prevent various losses of work processes by stopping the equipment and improve productivity. To achieve the objective, the present invention provides a device for remotely controlling a guide roll of sputtering equipment for manufacturing a tinting film. The sputtering equipment for manufacturing a tinting film comprises: a guide roll installed in a vacuum chamber to guide a movement of a film material; and an adjustment knob mounted on the guide roll to adjust a position of the guide roll with respect to the film material. The device for remotely controlling the guide roll of the sputtering equipment for manufacturing a tinting film comprises: a drive means to rotate the adjustment knob in a desired direction in the vacuum chamber; and a control means to remotely control drive of the drive means from outside the vacuum chamber.
申请公布号 KR20160020818(A) 申请公布日期 2016.02.24
申请号 KR20140106041 申请日期 2014.08.14
申请人 NEXFIL CO., LTD. 发明人 LEE, SHIN SOON;LEE, JAE CHUL
分类号 C23C14/34;B65H77/00;C23C14/56 主分类号 C23C14/34
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