发明名称 |
PIEZOELECTRIC ACOUSTIC RESONATOR WITH ADJUSTABLE TEMPERATURE COMPENSATION CAPABILITY |
摘要 |
A piezoelectric acoustic resonator with an adjustable temperature compensation capability is disclosed. The piezoelectric acoustic resonator includes: a piezoelectric acoustic reflection structure, a first electrode, a second electrode, a piezoelectric layer between the first electrode and the second electrode, and a temperature compensation layer; wherein the temperature compensation layer is a single-layer temperature compensation layer formed of Si x O y material, or a composite temperature compensation layer formed by stacking material with a positive temperature coefficient of sound velocity and material with a negative temperature coefficient of sound velocity; and the temperature compensation layer is configured to: perform reverse compensation for a temperature frequency shift caused by the first electrode, the piezoelectric layer and the second electrode in the piezoelectric acoustic resonator; wherein x:y is not equal to 1:2. |
申请公布号 |
EP2892153(A4) |
申请公布日期 |
2016.02.24 |
申请号 |
EP20130804060 |
申请日期 |
2013.08.21 |
申请人 |
ZTE CORPORATION;TIANJIN UNIVERSITY |
发明人 |
ZHANG, HAO;DU, LIANGZHEN;PANG, WEI;LI, JIANBANG;HU, NIANCHU;KANG, KAI |
分类号 |
H03H9/02;H01L41/18 |
主分类号 |
H03H9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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