| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technique capable of preventing bending of a substrate, in a MEMS device including the substrate and a movable part. <P>SOLUTION: A MEMS device including a substrate and a movable part movable relative to the substrate is disclosed. The MEMS device includes a lower conductive layer, an intermediate insulating layer, and an upper conductive layer. The lower conductive layer is formed so as to be thicker than the upper conductive layer. A bending prevention layer is formed at the outer side of the lower conductive layer. The bending prevention layer is formed in a range corresponding to the intermediate insulating layer. <P>COPYRIGHT: (C)2013,JPO&INPIT |
