SUBSTRATE FIXING HOLDER AND THIN FILM MANUFACTURING APPARATUS COMPRISING THE SUBSTRATE FIXING HOLDER

摘要

The present invention relates to a substrate fixing holder and a thin film manufacturing apparatus. The thin film manufacturing apparatus according to the present invention comprises a rotatory platform rotated based on one directional axis line, and having multiple containers independently storing an aqueous solution on the upper surface placed; a holder having at least one substrate including a thin film layer formed on the surface by reaction with the aqueous solution on the surface fixed, and vertically lifted to be in contact with the substrate with the aqueous solution of each container in a time series; and a controller controlling rotation of the rotatory platform and lifting of the holder based on an electrical signal. The purpose of the present invention is provide a substrate fixing holder increasing a manufacturing efficiency by fixing multiple substrates where a thin film having nano-sized width is formed on a single unit.