Continuous coating apparatus

摘要

Provided is a continuous coating apparatus which can supply a liquid coating material (a molten metal) to a levitation-heating space through various paths, and can easily control a supply flow rate of the liquid coating material, and has a simplified structure. The continuous coating apparatus includes: a vacuum chamber unit through which a coating target passes; a levitation-heating unit disposed in the vacuum chamber unit and generating an evaporation vapor by vaporizing a supplied coating material; and a liquid coating material supply unit connected so that a liquid coating material is supplied to at least one of an upper portion and a lower portion of the levitation-heating unit, and communicating with the outside of the vacuum chamber unit.

主权项

1. A continuous coating apparatus comprising:
a vacuum chamber unit through which a coating target passes; a levitation-heating unit disposed inside of the vacuum chamber unit and generating an evaporation vapor by vaporizing a supplied coating material; and a liquid coating material supply unit comprising:
a crucible disposed outside of the vacuum chamber unit and storing the liquid coating material;a coating material supply pipe wherein the coating material supply pipe is connected between the crucible and the levitation-heating unit so that the liquid coating material is supplied to at least one of an upper portion and a lower portion of the levitation-heating unit disposed inside the vacuum chamber unit, and communicating with the crucible disposed outside of the vacuum chamber unit;a vapor guide unit connected to the liquid coating material supply unit inside the vacuum chamber unit;a second heating unit provided in the vapor guide unit in addition to the levitation-heating unit; and a dipping-type valve unit including an opening/closing member provided in the crucible at a lower portion of an elevating member, so that the dipping-type valve unit controls an opening/closing degree of the inlet of the coating material supply pipe disposed in the liquid coating material stored in the crucible, whereby the supply flow rate of the coating material is controlled.