APPARATUS FOR MEASURING DEFORMATION OF LINEAR MOTION GUIDE AND STAGE

摘要

Disclosed is an apparatus for measuring deformation of a linear motion guide and a stage. The apparatus for measuring deformation of a linear motion guide uses a plurality of capacitive sensors with respect to a stage driven on a linear motion guide to measure deformation of the linear motion guide, and comprises: one or more capacitive sensors fixed to the outside of the stage to measure a distance to a side of the linear motion guide; and a processor to analyze output signals of the capacitive sensors to determine deformation of the linear motion guide in a Y-axis direction. The Y-axis direction can be a vertical direction to the side with respect to a longitudinal direction of the linear motion guide.