Electrostatic chuck device

摘要

An electrostatic chuck device includes an electrostatic chuck section (2), which has a principal surface that is a mounting surface on which a plate-like sample (W) is placed, and has an internal electrode for electrostatic adsorption (13) incorporated in the section, and a temperature adjustment base section (3) which adjusts the temperature of the electrostatic chuck section (2); wherein a part or all of a surface of the temperature adjustment base section (3) is covered by a sheet-like or film-like insulating material (4) wherein the surface faces the side where the electrostatic chuck section is located; a thin plate-like heater element (5) is bonded on the insulating material (4); and the electrostatic chuck section (2) and the temperature adjustment base section (3) are integrated with each other via an organic insulating adhesive layer (6) formed by curing a liquid adhesive.

主权项

1. An electrostatic chuck device comprising:
an electrostatic chuck section which has a principal surface that is a mounting surface on which a plate-like sample is placed, wherein the electrostatic chuck section comprises an internal electrode for electrostatic adsorption which is incorporated in the section, and a temperature adjustment base section which adjusts the temperature of the electrostatic chuck section; wherein a part or all of a surface of the temperature adjustment base section is covered by a sheet-like or film-like insulating material via a first adhesive layer, wherein a planar shape of the first adhesive layer is substantially the same as that of the insulating material, and the surface of the temperature adjustment base section faces to the side where the electrostatic chuck section is located; a thin plate-like heating member is bonded to a surface of the insulating material via a second adhesive layer, wherein a planar shape of the second adhesive layer is substantially the same as that of the plate-like heating member, and the surface of the insulating material faces to the side where the mounting surface exists; and the electrostatic chuck section and the temperature adjustment base section to which the insulating material and the heating member are provided are integrated with each other via an organic insulating adhesive layer as a third adhesive layer, which is formed by curing a liquid adhesive.