| 发明名称 | Integrated circuit with pressure sensor having a pair of electrodes | ||
| 摘要 | Disclosed is an integrated circuit (100), comprising a semiconductor substrate (110) carrying a plurality of circuit elements; and a pressure sensor including a cavity (140) on said semiconductor substrate, said cavity comprising a pair of electrodes (120, 122) laterally separated from each other; and a flexible membrane (130) over and spatially separated from said electrodes such that said membrane interferes with a fringe field between said electrodes, said membrane comprising at least one aperture (132). A method of manufacturing such an IC is also disclosed. | ||
| 申请公布号 | US9269832(B2) | 申请公布日期 | 2016.02.23 |
| 申请号 | US201313915523 | 申请日期 | 2013.06.11 |
| 申请人 | AMS INTERNATIONAL AG | 发明人 | Nackaerts Axel;Besling Willem Frederik Adrianus;Reimann Klaus |
| 分类号 | H01L29/84;H04R23/00;H01L21/00;H01L21/20;H01L21/28;B81C1/00;G01L9/00 | 主分类号 | H01L29/84 |
| 代理机构 | McDermott Will & Emery LLP | 代理人 | McDermott Will & Emery LLP |
| 主权项 | 1. An integrated circuit, comprising: a semiconductor substrate carrying a plurality of circuit elements; and a pressure sensor including a cavity on said semiconductor substrate, said cavity comprising: a pair of electrodes laterally separated from each other; and a flexible membrane spatially separated from said electrodes such that said flexible membrane interferes with a fringe field between said electrodes, said flexible membrane comprising at least one aperture; and wherein the flexible membrane is not between said pair of electrodes and the flexible membrane is an electrically conductive flexible membrane. | ||
| 地址 | Rapperswil-Jona CH | ||