Method for supplying sequential power impulses

摘要

The invention relates to a method for supplying power impulses for PVD sputtering cathodes subdivided into partial cathodes. In said method, the power impulse intervals acting on the partial cathodes are selected in such a way as to overlap, thereby dispensing with the need to interrupt the drawing of power supplied by the generator.

主权项

1. Method for supplying power impulses with a scalable power impulse interval for operating a PVD sputtering cathode, with the PVD sputtering cathode comprising a first partial cathode and a second partial cathode, wherein for the partial cathodes a maximum average power feed is prescribed and the duration of the power impulse intervals is prescribed, and the method comprising the following steps:
a) providing a generator with a predefined power output of at least 20 kW that is constant at least after switching on and after expiration of a power development interval, b) switching on the generator, c) connecting the first partial cathode to the generator so that the first partial cathode is fed with power from the generator, d) separating the generator from the first partial cathode after expiration of a predefined first power impulse interval corresponding to the first partial cathode, e) connecting the second partial cathode to the generator so that the second partial cathode is fed with power from the generator, f) separating the generator from the second partial cathode after expiration of a predefined second power impulse interval corresponding to the second partial cathode, wherein the first power impulse interval starts time-wise before the second power impulse interval and the first power impulse interval ends time-wise before an end of the second power impulse interval, wherein the steps d) and e) are executed in such a manner that the first power impulse interval and the second power impulse interval overlap in time and all power impulse intervals form together a first group, so that the power output from the generator remains sustained without interruption from the beginning of the first power impulse interval until the end of the second power impulse interval and a second power development interval does not occur, wherein during the overlap in time of the first power impulse interval and the second power impulse interval, a plasma burns only on the first partial cathode and, at the end of the first power impulse interval when the first partial cathode is separated from the generator, the plasma ignites on the second partial cathode such that the power impulse draw from the generator is uninterrupted.