Defect management systems and methods

摘要

Defect management systems and methods are disclosed. A system for managing defects on an object includes an automatic defect classification (ADC) module, a lithographic plane review (LPR) module, and a defect progression monitor (DPM) module in communication with the ADC module and the LPR module. The DPM module is adapted to obtain information regarding a defect disposed on the object from the ADC module and the LPR module and determine if a repair or cleaning is needed of the object.

主权项

1. A system for managing defects on an object, the system comprising:
a processor; and a non-transitory computer readable storage medium storing programming for execution by the processor, the programming including instructions for:
performing an automatic defect classification (ADC) algorithm;performing a lithographic plane review (LPR) algorithm, the LPR algorithm adapted to create a simulation image of an image of the object and perform an overlay comparison of the simulation image with an image file of a pattern layout file; andperforming a defect progression monitor (DPM) algorithm, the DPM algorithm adapted to obtain information regarding a defect disposed on the object from the ADC algorithm and the LPR algorithm and determine if a repair or cleaning is needed of the object.