Reactor with accurate temperature control

摘要

Disclosed herein is a reactor including, a plurality of reaction regions, and a plurality of heaters, each arranged in each of the reaction regions, wherein the heater including a semiconductor heat generating element and a semiconductor temperature detecting element and being capable of independent temperature control, and the temperature detecting element having a heat conduction region of metal thin film in its surrounding region.

主权项

1. A reactor comprising:
a plurality of reaction regions including a plurality of reaction wells; a plurality of heater units, each heater unit comprising a semiconductor heat generating element and a semiconductor temperature detecting element, wherein each reaction well includes a corresponding heater unit configured for independent temperature control, and wherein each said temperature detecting element has a heat conduction region enclosed and separated from other temperature detecting elements by a thermally conductive metal thin film constructed and arranged to diffuse heat from the semiconductor heat generating element to the semiconductor temperature detecting element; a cooling part adapted to absorb heat and a radiator adapted to release the absorbed heat; a data line driving circuit configured to provide the plurality of heater units information about an amount of heat generation; and a scanning line driving circuit configured to select a subset of heater units, write information about the amount of heat generation to the subset of heater units, and supply current to the subset of heater units in response to the written information about the amount of heat generation.