发明名称 |
Focused ion beam apparatus |
摘要 |
A focused ion beam apparatus includes: a focused ion beam tube configured to irradiate a focused ion beam onto a sample; a detector configured to detect secondary particles generated from the sample due to the irradiation and to output detection information regarding detected secondary particles; an image forming unit configured to form an observation image of the sample based on the detection information; a storage unit configured to store positional relation between a first processing area set on an observation image of a first sample and a cross-section surface of the first sample; and a processing area setting unit configured to automatically set a second processing area on an observation image of a second sample based on the positional relation stored in the storage unit and a position of a cross-section surface of the second sample on the observation image of the second sample. |
申请公布号 |
US9269539(B2) |
申请公布日期 |
2016.02.23 |
申请号 |
US201514665410 |
申请日期 |
2015.03.23 |
申请人 |
HITACHI HIGH-TECH SCIENCE CORPORATION |
发明人 |
Asahata Tatsuya;Suzuki Hidekazu;Sato Makoto |
分类号 |
H01J37/00;H01J37/317;H01J37/244;H01J37/22 |
主分类号 |
H01J37/00 |
代理机构 |
Adams & Wilks |
代理人 |
Adams & Wilks |
主权项 |
1. A focused ion beam apparatus comprising:
a focused ion beam tube configured to irradiate a focused ion beam onto a sample; a detector configured to detect secondary particles generated from the sample due to the irradiation with the focused ion beam and to output detection information regarding detected secondary particles; an image forming unit configured to form an observation image of the sample based on the detection information; a storage unit configured to store positional relation between a first processing area set on an observation image of a first sample and a cross-section surface of the first sample; and a processing area setting unit configured to automatically set a second processing area on an observation image of a second sample based on the positional relation stored in the storage unit and a position of a cross-section surface of the second sample on the observation image of the second sample. |
地址 |
JP |