Thermal convection-type accelerometer

摘要

A thermal convection-type accelerometer includes a first insulating substrate, a circuit formed on the first insulating substrate, a first acceleration-sensing device coupled with the circuit, and a first supporting layer attached on the insulating substrate. The first acceleration-sensing device includes two temperature-sensing components and a heater disposed between the temperature-sensing components. The temperature-sensing components and the heater are directly formed on the first supporting layer.

主权项

1. A thermal convection-type accelerometer, comprising:
a first insulating substrate; a circuit formed on the first insulating substrate; a first acceleration-sensing device coupled with the circuit, comprising two first temperature-sensing components and a first heater disposed between the two first temperature-sensing components; wherein the first heater is in a presence of a noble gas configured to prevent oxidation; a first supporting layer having a first side and a second side opposite to the first side, wherein the first insulating substrate is attached to the first side, and the support layer is configured to prevent the insulating substrate from contacting the noble gas; and wherein the first acceleration-sensing device is attached to the second side.