Manufacturing method of polysilicon layer, and polysilicon thin film transistor and manufacturing method thereof

摘要

A manufacturing method of a polysilicon layer and a manufacturing method of a polysilicon thin film transistor. The manufacturing method of the polysilicon layer includes: providing a substrate; forming a barrier layer and a buffer layer on the substrate; disposing a plurality of grooves in the buffer layer by a patterning process, and forming crystal seeds on the buffer layer; forming an amorphous silicon layer on the buffer layer provided with the grooves and on the crystal seeds; transferring the amorphous silicon layer into a polysilicon layer using a thermal treatment process.

主权项

1. A manufacturing method of a polysilicon layer, comprising:
providing a substrate; forming a buffer layer on the substrate; disposing a plurality of grooves in the buffer layer by a patterning process, and forming crystal seeds on the buffer layer, forming a first amorphous silicon layer on the buffer layer; transferring the first amorphous silicon layer into a first polysilicon layer; applying photoresist on the first polysilicon layer; after a multi-tone or half-tone exposure and development, forming a photoresist-completely-removed first window region at a predetermined position where the grooves are subsequently formed, forming photoresist with a second thickness at a predetermined position where the crystal seeds are subsequently formed, and forming photoresist with a first thickness in other regions, the second thickness being greater than the first thickness; etching to remove the first polysilicon layer and a part of the buffer layer exposed from the first window region to form the grooves, ashing to remove the photoresist with the first thickness; etching to remove the first polysilicon layer to be exposed; ashing to remove a remaining part of the photoresist with the second thickness, to form the crystal seeds; wherein the plurality of grooves are arranged respectively along a first direction and a second direction intersecting the first direction to form an interleaved groove pattern; forming an amorphous silicon layer on the buffer layer provided with the grooves and on the crystal seeds; transferring the amorphous silicon layer into a polysilicon layer using a thermal treatment process.