Manufacturing process monitoring system and manufacturing process monitoring method

摘要

According to one embodiment, a manufacturing process monitoring system for monitoring anomaly in a manufacturing process for products, the system includes an information storage section, a selection information section, a reference space formation section and a monitoring section. The information storage section is configured to store previously collected data. The selection information section is configured to create information used in classifying the data stored in the information storage section. The reference space formation section is configured to form a reference space based on data subjected to anomaly monitoring acquired in the manufacturing process and the data classified by the information from the data stored in the information storage section. The monitoring section is configured to monitor anomaly of the data subjected to anomaly monitoring based on the reference space.

主权项

1. A manufacturing process monitoring system for monitoring anomalies in a manufacturing process for products, the system comprising:
an information storage section configured to store data collected from plural lots of a manufactured product as previously collected data; a selection information section configured to create a value of a weighting factor, wherein the value of the weighting factor pertains to a product yield for each lot of the manufactured product and establishes a priority associated with the weighting factors when classifying the previously collected data, wherein a higher yield is classified with a higher priority; a detection apparatus configured to acquire data in the manufacturing process that is subjected to anomaly monitoring; a reference space formation section configured to classify the previously collected data provided from the information storage section to produce classified data by using a product of a distance and the value of the weighting factor, the reference space formation section configured to form a reference space based on the classified data, the distance being between the data subjected to anomaly monitoring and each of the previously collected data provided from the information storage section; and a monitoring section configured to monitor anomalies of the data subjected to anomaly monitoring based on the reference space.