发明名称 Micromechanical component and method for producing a micromechanical component
摘要 A micromechanical component is described as having a mounting support, an actuator plate having a coil, situated on and/or in the actuator plate, which is connected to the mounting support via at least one supply line spring. A mirror element and/or filter element is connected to the mounting support via the actuator plate and the at least one supply line spring. A spacer has a first end that contacts an inner side of the mirror element and/or the filter element that is directed away from an incident light surface of the mirror element and/or the filter element. The spacer has a second end that contacts a carrier side of the actuator plate that is aligned towards the mirror element and/or the filter element. Also described is a method for producing a micromechanical component.
申请公布号 US9268130(B2) 申请公布日期 2016.02.23
申请号 US201313864530 申请日期 2013.04.17
申请人 ROBERT BOSCH GMBH 发明人 Friese Christoph
分类号 G02B26/08;B81B7/02;B81C3/00 主分类号 G02B26/08
代理机构 Kenyon & Kenyon LLP 代理人 Kenyon & Kenyon LLP
主权项 1. A micromechanical component, comprising: a mounting support; at least one supply line spring; an actuator plate including a coil situated at least one of on and in the actuator plate, the actuator plate being connected to the mounting support via the at least one supply line spring; at least one of a mirror element and a filter element connected to the mounting support via the actuator plate and the at least one supply line spring; and a spacer including: a first end contacting an inner side of the at least one of the mirror element and the filter element facing away from an incident light surface of the at least one of the mirror element and the filter element, anda second end contacting a carrier side of the actuator plate aligned towards the at least one of the mirror element and the filter element.
地址 Stuttgart DE