Method of analyzing sample using secondary ion emitted from sample and analyzer for performing analysis method

摘要

Provided is a sample analysis method of irradiating a sample with a primary ion beam to analyze a secondary ion emitted from the sample by mass spectrometry, the sample analysis method including the steps of cooling a sample placed in a chamber; forming an ice layer on a surface of the cooled sample by discharging one of water and an aqueous solution to the chamber; and irradiating the surface of the sample with the primary ion beam with the ice layer being formed thereon, wherein an amount of the water forming the ice layer is 0.1 ng/mm2 or more and 20 ng/mm2 or less.

主权项

1. A sample analysis method comprising the steps of:
cooling a sample placed in a chamber; forming an ice layer on a surface of the cooled sample by discharging one of water and an aqueous solution to the chamber; irradiating the surface of the sample with a primary ion beam through the ice layer so as to emit a sample constituent from the sample under the ice layer as a secondary ion; and analyzing the secondary ion emitted from the sample under the ice layer due to the irradiation, wherein the sample constituent is protonated, wherein protonation of the sample constituent is promoted by the ice layer, and wherein an amount of water forming the ice layer is from 0.1 ng/mm2 to 20 ng/mm2.