发明名称 AIR BEARING AND TENSION CLAMP ASSEMBLY
摘要 The present invention relates to an air bearing and a tension clamp assembly using the same. Especially, the present invention relates to an air bearing which can stably maintain a slider by solving exhaust instability caused by gap non-uniformity due to grooves which are exhaust paths formed in symmetric porous plates among porous plates installed on the four sides of the air bearing, and a tension clamp assembly using the same.
申请公布号 KR101596306(B1) 申请公布日期 2016.02.22
申请号 KR20140132516 申请日期 2014.10.01
申请人 HIMS CO., LTD.;LNK CO., LTD. 发明人 KIM, JU HOAN
分类号 H01L51/56;H01L21/02 主分类号 H01L51/56
代理机构 代理人
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