发明名称 A CAN TYPE VAPOR GENERATOR FOR VAPOR DEPOSITION
摘要 The present invention relates to a technology for designing and manufacturing bear can type plasma vapor deposition equipment capable of maintaining sufficient strength even at a high temperature by using a tantalum material and preventing materials from being scattered at a high temperature. As the shape of the present invention is similar to a bear can, thus the present invention is named the bear can type plasma vapor deposition equipment. A vapor outlet and an electrode generating electronic arcs are formed in an end cap of the bear can type plasma vapor deposition equipment. A feeder capable of supplying a deposited powder is formed on the center of the bear can type plasma vapor deposition equipment while a V-shaped roof and a support cavity are formed inside the bear can type plasma vapor deposition equipment. The support cavity reinforces a kind of structures guiding generated vapor.
申请公布号 KR20160019338(A) 申请公布日期 2016.02.19
申请号 KR20140104019 申请日期 2014.08.11
申请人 SINSUNG PRECISION CO., LTD. 发明人 KIM, SUN HYUN
分类号 C23C14/32 主分类号 C23C14/32
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