DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS

摘要

Provided are a deposition apparatus and a method of manufacturing an organic light-emitting display (OLED) apparatus, which are capable of reducing manufacturing time and manufacturing costs of the OLED apparatus. The method includes: turning a substrate such that a deposition surface of the substrate faces upward; depositing a first deposition layer on a deposition surface of a first donor mask while the deposition surface of the first donor mask faces downward; arranging the first donor mask and the substrate such that the first donor mask is above the substrate while the first deposition layer faces downward and the deposition surface of the substrate faces upward; depositing, on the deposition surface of the substrate, a part of the first deposition layer of the deposition surface of the first donor mask; and turning the substrate such that the deposition surface of the substrate faces downward.

主权项

1. A method of manufacturing an organic light-emitting display (OLED) apparatus, the method comprising:
providing a substrate comprising a first surface facing generally downward and a second surface facing generally upward, wherein a pre-deposited layer is formed over the first surface; turning the substrate over such that a first surface of the substrate faces generally upward; depositing a first deposition material on a deposition surface of a first donor mask while the deposition surface of the first donor mask faces generally downward, thereby forming a first donor layer on the deposition surface of the first donor mask; arranging the first donor mask and the substrate such that the first donor mask is disposed above the substrate while the deposition surface of the first donor mask faces generally downward and the first surface of the substrate faces generally upward; transferring, over the first surface of the substrate, at least part of the first deposition material of the first donor layer, thereby forming a first deposition layer over the first surface of the substrate; and turning the substrate back such that the first surface of the substrate faces generally downward.