VACUUM PUMPING AND ABATEMENT SYSTEM

摘要

The present invention relates to a vacuum pumping and abatement system for evacuating processing gas from a process chamber and removing noxious substances from the processing gas. The present invention also relates to a method of purging a vacuum pumping arrangement. The present invention seeks to reduce the cost of ownership and operation and carbon footprint of such systems, by providing a vacuum pumping and abatement system for evacuating processing gas from a process chamber and removing noxious substances from the processing gas, comprising a vacuum pumping arrangement for evacuating processing gas from a process chamber; a source of compressed air for purging the vacuum pumping arrangement during evacuation; and a burner for receiving processing gas and compressed air from the vacuum pumping arrangement and removing noxious substances therefrom by burning the processing gas in oxygen wherein at least some of the oxygen that supports combustion is derived from the compressed air.

主权项

1. A vacuum pumping and abatement system for evacuating processing gas from a process chamber and removing noxious substances from the processing gas, comprising:
a vacuum pumping arrangement for evacuating processing gas from the process chamber; a source of compressed air for purging the vacuum pumping arrangement during evacuation; and a burner for receiving processing gas and compressed air from the vacuum pumping arrangement and removing noxious substances therefrom by burning the processing gas in oxygen wherein at least some of the oxygen that supports combustion is derived from the compressed air.