发明名称 X-RAY APPARATUS
摘要 An equipment mount for an x-ray apparatus is disclosed. The mount comprises a main shield element, a peripheral shield element and a secondary shield element arranged to permit a mounting element to pass through the main shield element in a shielded manner. A support apparatus for an x-ray apparatus is also disclosed. The support apparatus comprises a separable bearing for translating a support part between a first position and a second position and an elevator mechanism for translating the support part from the second position to a third position, thereby separating the bearing. A manipulator stage for an x-ray apparatus is also disclosed. The stage comprises a first support structure arranged to support a sample stage and supported at first and second positions either side of the sample stage by second and third support structures, the second and third support structures being configured to allow the first support structure to raise and lower while remaining supported at both ends.
申请公布号 WO2016023949(A1) 申请公布日期 2016.02.18
申请号 WO2015EP68555 申请日期 2015.08.12
申请人 NIKON METROLOGY NV 发明人 PRICE, BEN;BEECHEY, MICHAEL;SMITH, JAMES
分类号 G01N23/20;G01N23/22;G01Q30/18;H01J35/16;H01J37/16 主分类号 G01N23/20
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