SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a transistor having a small subthreshold swing value; or provide a transistor having a shallow interface state density at an interface between a semiconductor and a gate insulator; or provide a transistor having favorable electric characteristics.SOLUTION: A semiconductor device comprises an insulator, a semiconductor and a conductor. The semiconductor has a region where the semiconductor and the conductor overlap each other via the insulator. In the region, a shallow interface state density in an interface between the semiconductor and the insulator is equal to or less than 1×10cm.SELECTED DRAWING: Figure 1