PLATE MICROVALVE WITH IMPROVED SEALING MECHANISM

摘要

A microvalve includes a first plate having a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port. A second plate defines a non-movable portion and a movable portion, a surface of the non-movable portion abutting the surface of the first plate, the non-movable portion having first and second openings formed therethrough. The movable portion is formed within the first opening and has an axis, the movable portion defining a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening. The displaceable member is slidingly and axially movable within the first opening between a closed position, wherein the displaceable member cooperates with the sealing structure to prevent fluid communication through the fluid port, and an opened position, wherein the displaceable member does not cooperate with at least a portion of the sealing structure to prevent fluid communication through the fluid port.

主权项

1. A microvalve comprising:
a first plate including a surface, a recessed region provided within the surface, a fluid port provided within the recessed region, and a sealing structure extending about the fluid port; and a second plate defining a non-movable portion and a movable portion, a surface of the non-movable portion abutting the surface of the first plate, the non-movable portion having first and second openings formed therethrough, the movable portion formed within the first opening and having an axis, the movable portion defining a displaceable member connected to the non-movable portion by a convoluted spring formed in a second opening, the displaceable member slidingly and axially movable within the first opening between a closed position, wherein the displaceable member cooperates with the sealing structure to prevent fluid communication through the fluid port, and an opened position, wherein the displaceable member does not cooperate with at least a portion of the sealing structure to prevent fluid communication through the fluid port.