发明名称 |
ENHANCED ENCLOSURES FOR ACOUSTICAL GAS CONCENTRATION SENSING AND FLOW CONTROL |
摘要 |
Mass-transfer rate control arrangement and method in which a process precursor mixture is produced containing carrier gas and a process precursor gas. A quantity of the process precursor present in the process precursor mixture is acoustically sensed to produce a sensor output. A dilution gas is provided and the process precursor mixture and the dilution gas are separately conveyed to a dilution point, at which a diluted mixture of the dilution gas and the process precursor mixture is achieved. A relative flow rate of the carrier gas and the dilution gas is automatically controlled in response to the sensor output such that the diluted mixture at the dilution point has a prescribed mass transfer rate of the precursor gas. |
申请公布号 |
WO2016025367(A1) |
申请公布日期 |
2016.02.18 |
申请号 |
WO2015US44423 |
申请日期 |
2015.08.10 |
申请人 |
VEECO INSTRUMENTS INC. |
发明人 |
LOGUE, RAY;SIROTA, DON;KARKALA, KARTHIK;ARMOUR, ERIC;MORATH, CHRISTOPHER, J.;SINHAROY, ARINDAM |
分类号 |
G01N29/024;G01N29/22;G01N29/44 |
主分类号 |
G01N29/024 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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