| 摘要 |
Disclosed is a large area glass substrate heat treatment apparatus, and more particularly, a batch-type large area heat treatment chamber for heat-treating glass substrates with a large area that has an internal separation wall and an external separation wall and develops heat exhaust between the internal and external separation walls to provide a thermal cycling layer, thereby retaining temperature homogeneity. The heat treatment chamber according to the present invention also has carbon fiber heating elements vertically aligned on a side of the internal separation wall, or the substrate, reflective plates configured behind the heat sources to maximize radiant energy and nozzle systems between the heat sources and reflective plates that supply source gas to generate convection energy for compensating for the drawbacks of the radiant energy. The heat treatment chamber further comprises, across a front opening, a plurality of shutter doors that are separated from each other in order to prevent external air inflow when loading onto or unloading from batch-type substrate loading boats (1310) a large quantity of the glass substrates (1200) with a large area. In addition, the heat treatment chamber further comprises shower heads in the shutter doors installed across the front opening in order to prevent internal heat energy outflow and external cold air inflow when the shutter doors open. |
