LASER BEAM MACHINING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a laser beam machining device capable of achieving space-saving, high-speed, and high-quality laser beam machining using simultaneous multiple radiation.SOLUTION: A laser beam machining device comprises: a laser oscillator 3a serving as first laser oscillation means for outputting a first laser beam; a laser oscillator 3b serving as second laser oscillation means for outputting a second laser beam; a sub-galvanometer scanner 7a serving as a first sub-galvanometer scanner; a sub-galvanometer scanner 7b serving as a second sub-galvanometer scanner; a polarization beam splitter 8 serving as laser mixture means; main galvanometer scanners 9a and 9b; an F&thetas; lens 10 for condensing the first laser beam and the second laser beam from the main galvanometer scanners 9a and 9b; and a laser oscillator controller 22 serving as laser oscillation control means for individually controlling the first laser oscillation means and the second laser oscillation means.SELECTED DRAWING: Figure 1