PEELING DEVICE, PEELING SYSTEM AND PEELING METHOD

摘要

PROBLEM TO BE SOLVED: To enhance the efficiency of peeling processing.SOLUTION: A first holder holds a first board out of a stack board. A second holder holds a second board of the stack board, and moves the second board in a direction along which the second board is separated from the plate face of the first board. A peeling induction unit has a sharp member having a blade edge portion at the tip thereof and a moving mechanism for moving the sharp member to the side surface of the stack board. The second holder has a first sucking and moving unit and a second sucking and moving unit. The first sucking and moving unit sucks the peripheral edge portion of the second board which corresponds to a site formed by the peeling induction unit, and moves the peripheral edge portion in the direction along which the peripheral edge portion is separated from the plate face of the first board. The second sucking and moving unit sucks an area nearer to the center portion of the second board than the peripheral edge portion of the second board, and moves the area in a direction along which the area is separated from the plate face of the first board. The first sucking and moving unit has a suction pad in which the width of the suction pad in a direction perpendicular to the moving direction of the sharp member by the moving mechanism is smaller than the blade width of the sharp member.SELECTED DRAWING: Figure 11D