| 发明名称 |
NOZZLE FOR DEPOSITION SOURCE AND THIN FILM DEPOSITING APPARATUS INCLUDING THE NOZZLE |
| 摘要 |
A deposition source nozzle including a convergence guide configured to guide a deposition source material discharged from the deposition source nozzle to a convergence direction with respect to the deposition source nozzle, and a divergence guide configured to guide the deposition source material discharged from the deposition source nozzle to a divergence direction with respect to the deposition source nozzle, the divergence direction being opposite to the convergence direction with respect to the discharging direction of the deposition source material. |
| 申请公布号 |
US2016047041(A1) |
申请公布日期 |
2016.02.18 |
| 申请号 |
US201514665393 |
申请日期 |
2015.03.23 |
| 申请人 |
Samsung Display Co., Ltd. |
发明人 |
PARK Kookchol;NOH Sokwon |
| 分类号 |
C23C16/455 |
主分类号 |
C23C16/455 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A deposition source nozzle, comprising:
a convergence guide configured to guide a deposition source material discharged from the deposition source nozzle in a convergence direction with respect to the deposition source nozzle; and a divergence guide configured to guide the deposition source material discharged from the deposition source nozzle in a divergence direction with respect to the deposition source nozzle, the divergence direction being opposite to the convergence direction with respect to the discharging direction of the deposition source material. |
| 地址 |
Yongin-city KR |
