发明名称 PROCESSING DEVICE FOR METAL MATERIAL
摘要 Provided is a processing device for a metal material, the device comprising: an airtight container that holds a sample therewithin; an oxygen pump that extracts oxygen molecules from a gas discharged from the airtight container; a circulation means that returns the gas to the airtight container; and a plasma generation means that converts the gas returned from the circulation means into plasma and irradiates the sample with the same.
申请公布号 WO2016024586(A1) 申请公布日期 2016.02.18
申请号 WO2015JP72754 申请日期 2015.08.11
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;SIJTECHNOLOGY, INC. 发明人 SHIRAKAWA, NAOKI;MURATA, KAZUHIRO
分类号 B22F3/10;B22F1/00;H01B13/00;H01L21/288 主分类号 B22F3/10
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