发明名称 |
PROCESSING DEVICE FOR METAL MATERIAL |
摘要 |
Provided is a processing device for a metal material, the device comprising: an airtight container that holds a sample therewithin; an oxygen pump that extracts oxygen molecules from a gas discharged from the airtight container; a circulation means that returns the gas to the airtight container; and a plasma generation means that converts the gas returned from the circulation means into plasma and irradiates the sample with the same. |
申请公布号 |
WO2016024586(A1) |
申请公布日期 |
2016.02.18 |
申请号 |
WO2015JP72754 |
申请日期 |
2015.08.11 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY;SIJTECHNOLOGY, INC. |
发明人 |
SHIRAKAWA, NAOKI;MURATA, KAZUHIRO |
分类号 |
B22F3/10;B22F1/00;H01B13/00;H01L21/288 |
主分类号 |
B22F3/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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