COMPACT MICROELECTRONIC INTEGRATED GAS SENSOR

摘要

A compact microelectronic gas sensor module includes electrical contacts formed in such a way that they do not consume real estate on an integrated circuit chip. Using such a design, the package can be miniaturized further. The gas sensor is packaged together with a custom-designed Application Specific Integrated Circuit (ASIC) that provides circuitry for processing sensor signals to identify gas species within a sample under test. In one example, the output signal strength of the sensor is enhanced by providing an additional metal surface area in the form of pillars exposed to an electrolytic gas sensing compound, while reducing the overall package size. In some examples, bottom side contacts are formed on the underside of the substrate on which the gas sensor is formed. Sensor electrodes may be electrically coupled to the ASIC directly, or indirectly by vias.

主权项

1. A device, comprising:
a substrate having upper and lower surfaces; bottom side contacts formed on the lower surface of the substrate, the bottom side contacts coupled to vias that extend between the upper and lower surfaces of the substrate; a cap extending above the substrate, the cap configured to contain a chemireactive gas sensing compound; a sensor electrode having a metal surface area exposed to the chemireactive gas sensing compound, the sensor electrode operable to close a sensor circuit upon acquiring an electric charge from the gas sensing compound in response to presence of a selected gas species; and a lid attached to the cap, the lid covering the gas sensing compound and having one or more openings therein that permit entry of the gas species into the cap.