| 摘要 |
PROBLEM TO BE SOLVED: To provide a metal oxide film including a crystal part and provide a metal oxide film having highly stable physical properties.SOLUTION: In an electron diffraction pattern using nanobeam electron diffraction, a metal oxide film has a new structure in which spots different from a halo pattern indicating an amorphous state and also different from spots with regularity indicating a crystalline state aligned with a specific plane are observed, the spots having no directionality and circumferentially distributed. The spots are not observed in a selected-area electron diffraction pattern.SELECTED DRAWING: Figure 1 |
