发明名称 VAPOUR DEPOSITION WIRE SOURCE
摘要 A vapour deposition wire source, comprising a housing (100) and a crucible (200) arranged in the housing (100), wherein the crucible (200) comprises a pot body (201) and a nozzle (202), the pot body (201) is externally provided with a heating device (300) for heating the pot body (201), and a heat insulation device (400) for preventing heat from dissipating towards the housing (100) is arranged between the housing (100) and the heating device (300).
申请公布号 WO2016023280(A1) 申请公布日期 2016.02.18
申请号 WO2014CN90482 申请日期 2014.11.06
申请人 BOE TECHNOLOGY GROUP CO., LTD.;ORDOS YUANSHENG OPTOELECTRONICS CO., LTD. 发明人 XIAO, ANG
分类号 C23C14/24 主分类号 C23C14/24
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