THERMALLY CONDUCTIVE SHEET, CURED PRODUCT OF THERMALLY CONDUCTIVE SHEET, AND SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thermally conductive sheet and a cured product of the sheet which exhibit excellent balance between thermal radiation property and insulating property, and a semiconductor device having high durability.SOLUTION: A thermally conductive sheet according to the present invention includes a thermosetting resin (A) and an inorganic filler (B) dispersed in the thermosetting resin (A). In measurement of pore diameter distribution by a mercury intrusion method for the inorganic filler (B) included in an incineration residue after a cured product of the thermally conductive sheet is heated and incinerated at 700°C for 4 hours, a porosity of the inorganic filler represented by 100×b/a is between at least 40% and 65% or less, where a represents the volume of particles of the inorganic filler included in the incineration residue, and b represents the volume of voids in the particles of the inorganic filler included in the incineration residue measured by the mercury intrusion method. An average pore diameter of the inorganic filler included in the incineration residue measured by the mercury intrusion method is between at least 0.20 μm and 1.35 μm or less.SELECTED DRAWING: None