FLOW CONTROL VALVE FOR FLOW CONTROLLER

摘要

A flow control valve for a flow controller includes a valve main body provided with an open-top valve chamber hole, a metal diaphragm valve element, a lower support cylinder having notches facing each other, an upper support cylinder attached to the lower support cylinder, a support frame horizontally disposed through the notches of the lower support cylinder, a disc spring placed between the support frame and a bottom of the lower support cylinder, a lower cradle placed on the support frame, a piezoelectric element inserted into the support cylinder above the lower cradle, a guide fixed to the valve main body together with the support frame with the support cylinder being inserted through the guide cylinder in a vertically movable manner. The support cylinder is pressed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force.

主权项

1. A flow control valve for a flow controller, comprising:
a valve main body provided with an open-top valve chamber hole having a valve seat on a bottom, a fluid inlet passage communicating with the valve chamber hole, and a fluid outlet passage communicating with the valve chamber hole; a metal diaphragm valve element in an inverted dish shape disposed above the valve seat to face the valve seat, with an outer periphery being hermetically fixed to the bottom of the valve chamber hole; a pressing screw screwed and inserted into the valve chamber hole to press and fix the outer periphery of the metal diaphragm valve element; a lower support cylinder inserted through the pressing screw into the valve chamber hole, provided with a diaphragm presser below a bottom wall at a tip portion, and also having, on a side wall, rectangular through notches extending from an upper end of the side wall to an intermediate portion of the side wall; an upper support cylinder in a cylindrical shape screwed and attached to an upper end portion of the lower support cylinder to form a support cylinder; a disc spring cradle placed on a bottom wall of the lower support cylinder and having a disc spring holder; a disc spring placed on the disc spring cradle; a support frame horizontally disposed through the notches of the lower support cylinder, having a disc spring cradle guide hole in the center for holding a tip portion of the disc spring holder, and also having, at each end portion, a bolt insertion hole for a fixing bolt; a lower cradle placed above the disc spring cradle guide hole of the support frame; a piezoelectric element inserted into the support cylinder above the lower cradle; a guide provided with a guide cylinder and a flange projecting from a lower end portion of the guide cylinder toward both sides, and fixed to the valve main body together with the support frame by a fixing bolt with the support cylinder being inserted through the guide cylinder in a vertically movable manner and the flange facing each end portion of the support frame; and a positioning nut screwed and attached to an upper end portion of the upper support cylinder, wherein the flow control valve for a flow controller is configured such that the support cylinder is pushed upward by the extension of the piezoelectric element, whereby the metal diaphragm valve element is separated from the valve seat by the elastic force of the metal diaphragm valve element.