TREATMENT SOLUTION SUPPLY METHOD, TREATMENT SOLUTION SUPPLY APPARATUS, AND COMPUTER-READABLE RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To provide a treatment solution supply method capable of keeping particle collecting efficiency over a long enough time, a treatment solution supply apparatus, and a recording medium.SOLUTION: A treatment solution supply method according to the present invention is used for supplying a treatment solution to a substrate. The treatment solution supply method includes the steps of: applying a DC voltage to the treatment solution; detecting a potential difference between two points in the treatment solution in a state where the DC voltage is applied to the treatment solution; and increasing the DC voltage when the detected potential difference is less than a first reference value.SELECTED DRAWING: Figure 5