CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER HAVING NANOPILLAR STRUCTURE AND METHOD OF FABRICATING THE SAME

摘要

Example embodiments relate to a capacitive micromachined ultrasonic transducer (CMUT) having a nanopillar structure and a method of fabricating the same. The CMUT may include a conductive device substrate, a support defining a plurality of cavities corresponding to elements on the device substrate, a membrane on the support to form the plurality of cavities, an upper electrode on the membrane, and a plurality of nanopillars on at least one of the membrane and the device substrate exposed to the plurality of cavities.

主权项

1. A capacitive micromachined ultrasonic transducer (CMUT) comprising:
a conductive device substrate; a support defining a plurality of cavities corresponding to a plurality of elements on the device substrate; a membrane on the support to form the plurality of cavities; an upper electrode on the membrane; and a plurality of nanopillars on at least one of the membrane and the device substrate, exposed to the plurality of cavities.