HIGH-PURITY SILICON TO FORM SILICON CARBIDE FOR USE IN A FLUIDIZED BED REACTOR

摘要

Segmented silicon carbide liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed, as well as methods of making and using the segmented silicon carbide liners. Non-contaminating bonding materials for joining silicon carbide segments also are disclosed. One or more of the silicon carbide segments may be constructed of reaction-bonded silicon carbide.

主权项

1. A silicon carbide liner for a fluidized bed reactor for production of polysilicon-coated granulate material, the liner having an inwardly facing surface that at least partially defines a reaction chamber, at least a portion of the liner comprising reaction-bonded silicon carbide having, on at least a portion of the inwardly facing surface of the liner, a surface contamination level of:
less than 3% atomic of dopants; and less than 5% atomic of foreign metals.