FILM FORMING APPARATUS AND FILM FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a film forming apparatus capable of obtaining a homogeneous film.SOLUTION: A film forming apparatus of the present invention is a film forming apparatus for forming a film by transferring mist comprising raw materials on a substrate by the use of carrier gas. The film forming apparatus includes: a mist generator atomizing the raw materials to generate mist; carrier gas supply means supplying the carrier gas; and a supply pipe supplying the mist having been generated in the mist generator onto the substrate by the use of the carrier gas. The film forming apparatus further includes mist acceleration means further accelerating the mist transferred by the use of the carrier gas, onto the substrate.SELECTED DRAWING: Figure 1