| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor capable of obtaining a homogeneous film, in particular a film homogeneous in film thickness, when the susceptor is applied for a film forming apparatus, in particular for a film forming apparatus using mist and a film forming apparatus including a tubular furnace.SOLUTION: There is provided a susceptor used for a film forming apparatus, in particular for a film forming apparatus using mist and a film forming apparatus including a tubular furnace, in order to hold a substrate. In the susceptor, a substrate holding part holding the substrate and a support part supporting the substrate holding part are provided integrally or separately, and an outer peripheral shape of a substrate side surface is substantially semicircular. There is also provided a use of the susceptor for a film forming apparatus.SELECTED DRAWING: Figure 1 |
