POSITION DETECTION DEVICE, POSITION DETECTION METHOD, IMPRINT DEVICE, AND MANUFACTURING METHOD OF ARTICLES

摘要

PROBLEM TO BE SOLVED: To provide a device advantageous for detecting relative positions of two diffraction gratings that generate moire.SOLUTION: A position detection device includes; a detection part 25 that detects moire generated when a first diffraction grating 4 including a pattern arranged in a first direction and a second diffraction grating 5 including a pattern arranged in the first direction overlap with each other; and a processing part 26 that determines relative positions of the first diffraction grating and the second diffraction grating on the basis of the moire. The width in the first direction of a pattern at an end of the pattern included in at least one of the first diffraction grating and the second diffraction grating, is smaller than the width in the first direction of another pattern included in the at least one of the diffraction gratings.SELECTED DRAWING: Figure 2