OPTICAL WAVEGUIDE AND ELECTRONIC DEVICE

摘要

A optical waveguide comprising a core layer having a core portion; a first clad layer formed on one surface of the core layer; a second clad layer formed on another surface of the core layer; and a hollow section penetrating through the second clad layer and the core layer, and extending to a middle portion of the first clad layer, wherein a part of an inner wall surface at the hollow section is configured as an inclined plane which is inclined relative to and intersects with a plane including an interfacial plane between the core layer and the first clad layer, and a minimum radius of curvature at a connection between the inclined plane and other parts of the inner wall surface continuously extending from the inclined plane is 1 to 500 μm as measured at the plane including the interfacial plane.

主权项

1. A optical waveguide, comprising:
a core layer having a core portion; a first clad layer formed on one surface of the core layer; a second clad layer formed on another surface of the core layer; and a hollow section penetrating through the second clad layer and the core layer, and extending to a middle portion of the first clad layer, wherein a part of an inner wall surface at the hollow section is configured as an inclined plane which is inclined relative to and intersects with a plane including an interfacial plane between the core layer and the first clad layer, and a minimum radius of curvature at a connection between the inclined plane and other parts of the inner wall surface continuously extending from the inclined plane is 1 to 500 μm as measured at the plane including the interfacial plane.