发明名称 |
METHOD FOR PRODUCING VAPOR DEPOSITION MASK, AND METHOD FOR PRODUCING ORGANIC SEMICONDUCTOR ELEMENT |
摘要 |
A method for producing a vapor deposition mask capable of satisfying both enhancement in definition and reduction in weight even when a size is increased, and a method for producing an organic semiconductor element capable of producing an organic semiconductor element with high definition are provided. A vapor deposition mask is produced by the steps of preparing a metal plate with a resin layer in which a resin layer is provided on one surface of a metal plate, forming a metal mask with a resin layer by forming a slit that penetrates through only the metal plate, for the metal plate in the metal plate with a resin layer, and thereafter, forming a resin mask by forming openings corresponding to a pattern to be produced by vapor deposition in a plurality of rows lengthwise and crosswise in the resin layer by emitting a laser from the metal mask side. |
申请公布号 |
US2016049586(A1) |
申请公布日期 |
2016.02.18 |
申请号 |
US201514923497 |
申请日期 |
2015.10.27 |
申请人 |
DAI NIPPON PRINTING CO., LTD. |
发明人 |
TAKEDA Toshihiko;NISHIMURA Hiroyuki;OBATA Katsunari |
分类号 |
H01L51/00;B05B15/04 |
主分类号 |
H01L51/00 |
代理机构 |
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代理人 |
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主权项 |
1. A method for producing a vapor deposition mask that is formed by a metal mask provided with a slit, and a resin mask that is positioned on a front surface of the metal mask, and has openings corresponding to a pattern to be produced by vapor deposition arranged in a plurality of rows being stacked on each other, comprising the steps of:
preparing a metal plate with a resin layer in which a resin layer is provided on one surface of the metal plate; forming a metal mask with a resin layer by forming a slit that penetrates through only the metal plate, for the metal plate in the metal plate with a resin layer; and forming a resin mask by forming the openings corresponding to a pattern to be produced by vapor deposition in a plurality of rows in the resin layer by emitting a laser from the metal mask side. |
地址 |
Tokyo JP |